Master
English
Engineering
Master of Science in Micro- and Nanotechnologies
Master
About the Program
Studying microtechnologies and nanotechnologies at the TU Ilmenau offers a combination of classical microtechnologies and modern nanotechnologies. It covers methods, tools, and theoretical considerations for research and development in the world of microscale and nanoscale structures. The aim of this engineering science-oriented interdisciplinary Master's programme is to teach the scientific fundamentals and basic technical knowledge about microstructure and nanostructure generation as well as their systemic integration in systems. Students acquire skills to contribute and drive future developments in microtechnologies and nanotechnologies as well as nanotechnical applications. Particular attention is devoted to teaching the relevant methodological variety of lithographic nanostructuring techniques (top-down strategy), the molecular structuring through self-assembly (bottom-up approach), the opportunity of combining both concepts, and the required characterisation techniques. The programme comprises the following foci: Nanotechnology, nanoelectronics, and nanosensors Materials for microtechnologies and nanotechnologies Technologies of microstructuring and nanostructuring Structure and material characterisation Semiconductors Microsystems technology / system integration Microelectronic packaging and assembly Under the principle of unity of research and teaching, this interdisciplinary programme is supported by the Institute of Micro- and Nanotechnologies MacroNano® and its Centre of Micro- and Nanotechnologies. Students will be involved in research projects from an early stage. They have the opportunity to gain hands-on experience in the modern laboratory space (used as clean rooms in different classes) available in two technology buildings.
▶ Show the original English text
Studying microtechnologies and nanotechnologies at the TU Ilmenau offers a combination of classical microtechnologies and modern nanotechnologies. It covers methods, tools, and theoretical considerations for research and development in the world of microscale and nanoscale structures. The aim of this engineering science-oriented interdisciplinary Master's programme is to teach the scientific fundamentals and basic technical knowledge about microstructure and nanostructure generation as well as their systemic integration in systems. Students acquire skills to contribute and drive future developments in microtechnologies and nanotechnologies as well as nanotechnical applications. Particular attention is devoted to teaching the relevant methodological variety of lithographic nanostructuring techniques (top-down strategy), the molecular structuring through self-assembly (bottom-up approach), the opportunity of combining both concepts, and the required characterisation techniques. The programme comprises the following foci: Nanotechnology, nanoelectronics, and nanosensors Materials for microtechnologies and nanotechnologies Technologies of microstructuring and nanostructuring Structure and material characterisation Semiconductors Microsystems technology / system integration Microelectronic packaging and assembly Under the principle of unity of research and teaching, this interdisciplinary programme is supported by the Institute of Micro- and Nanotechnologies MacroNano® and its Centre of Micro- and Nanotechnologies. Students will be involved in research projects from an early stage. They have the opportunity to gain hands-on experience in the modern laboratory space (used as clean rooms in different classes) available in two technology buildings.
Which Professions Does This Program Open Up?
Related profession searches from Bundesagentur für Arbeit (BERUFENET) data:
Explore all professions →Subjects / Topic Areas
Electrical Engineering
Similar Programs
Mechatronik
Technische Universität Darmstadt
Master of Science (M.Sc.)
Energie- und Verfahrenstechnik
Rheinland-Pfälzische Technische Universität Kaiserslautern-Landau
Master of Science (M.Sc.)
Mechanical Engineering
Leibniz Universität Hannover
Master of Science (M.Sc.)
Civil Engineering – Structural Engineering Track
Leibniz Universität Hannover
Master of Science (M.Sc.)
Energy Management and Energy Engineering
Technische Hochschule Nürnberg Georg Simon Ohm
Master of Engineering (M.Eng.)
Mechanical Engineering
Hochschule Bonn-Rhein-Sieg
Master of Engineering (M.Eng.)
How do I apply to Master of Science in Micro- and Nanotechnologies at Technische Universität Ilmenau?
Most international applicants apply via uni-assist (document verification + APS for some countries). Prepare your secondary/Bachelor diploma, transcripts, language certificate (DSH/TestDaF or IELTS/TOEFL), motivation letter and CV. Non-EU students also need a Sperrkonto (~11,904 EUR/year) for the visa.
- Check requirements — Verify your degree is recognised + meet language/grade thresholds.
- Get language certificate — TestDaF / DSH for German programmes, IELTS / TOEFL for English.
- Submit via uni-assist (non-EU) — Document review + APS if your country requires it (China, India, Pakistan, Vietnam, etc.).
- Apply directly or via uni portal — Some universities accept direct applications — check the official programme page.
- Open Sperrkonto + apply for visa — After admission, deposit 11,904 EUR, get health insurance, book embassy appointment.
Frequently Asked Questions
Quick answers about Master of Science in Micro- and Nanotechnologies at Technische Universität Ilmenau
Is Master of Science in Micro- and Nanotechnologies at Technische Universität Ilmenau taught in German or English? ▼
This Master programme is taught in English. Make sure to check the language requirements (e.g. TestDaF, DSH, IELTS or TOEFL) before applying.
How much does the Master of Science in Micro- and Nanotechnologies programme cost? ▼
No tuition fee (only semester contribution). International students should also budget around 800–1000 EUR/month for living costs in Germany.
What are the admission requirements for Master of Science in Micro- and Nanotechnologies at Technische Universität Ilmenau? ▼
Typical requirements include: a recognised secondary/undergraduate degree, proof of language proficiency (English), and (for non-EU applicants) a uni-assist application plus financial proof (Sperrkonto ~11.904 EUR/year).
When is the application deadline? ▼
Application deadlines vary: winter semester usually closes on 15 July, summer semester on 15 January. Always confirm the exact deadline on the official university website.
Can I work in Germany while studying Master of Science in Micro- and Nanotechnologies? ▼
Yes. International students may work up to 140 full days / 280 half days per year without additional permission. After graduation you can apply for an 18-month job-seeker permit.
How do I apply to Technische Universität Ilmenau — directly or via uni-assist? ▼
Most German universities accept international applications through uni-assist for document verification. Some unis accept direct applications — check the programme page on the official site.